Inhoe Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Inhoe Kim returned 3 record(s).

Number	Title
1	Effect of Nitrogen Incorporation in HfO₂ Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2	Atomic Layer Deposition of HfO₂ Thin Films on Ultrathin SiO₂ Formed by Remote Plasma Oxidation
3	Thermodynamic properties and interfacial layer characteristics of HfO₂ thin films deposited by plasma-enhanced atomic layer deposition