Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Rachid Driad Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rachid Driad returned 1 record(s).

NumberTitle
1Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si