Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yu-Wei Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Wei Lu returned 1 record(s).

NumberTitle
1Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing