Inductively coupled plasma sources from Plasma ALD, LLC.


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Chung Yi Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chung Yi Kim returned 1 record(s).

NumberTitle
1Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time