Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yesmin Panecatl-Bernal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yesmin Panecatl-Bernal returned 1 record(s).

NumberTitle
1Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition