Inductively coupled plasma sources from Plasma ALD, LLC.


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Sanghyun Ju Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sanghyun Ju returned 2 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of superconducting niobium nitride
2Direct deposition of aluminum oxide gate dielectric on graphene channel using nitrogen plasma treatment