Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Elizaveta Smirnova Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Elizaveta Smirnova returned 2 record(s).

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
2Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2