Sebastian Goerke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sebastian Goerke returned 2 record(s).

Number	Title
1	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
2	Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes