Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Kwang Hum Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kwang Hum Lee returned 1 record(s).

NumberTitle
1Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor