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H. Jussila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. Jussila returned 2 record(s).

NumberTitle
1Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
2High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning