Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Jimmy Melskens Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jimmy Melskens returned 1 record(s).

NumberTitle
1Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films