Inductively coupled plasma sources from Plasma ALD, LLC.


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Lawrence Latu-Romain Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lawrence Latu-Romain returned 1 record(s).

NumberTitle
1Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode