Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

D.N. Johnstone Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D.N. Johnstone returned 1 record(s).

NumberTitle
1α-Ga2O3 grown by low temperature atomic layer deposition on sapphire