Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J.-J. Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J.-J. Lee returned 1 record(s).

NumberTitle
1Self-limiting diamond growth from alternating CFx and H fluxes