Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Tahone Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tahone Yang returned 1 record(s).

NumberTitle
1Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition