Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Alexander N. Sprafke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander N. Sprafke returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells