L. Fry-Bouriaux Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by L. Fry-Bouriaux returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures |