Silvia Lenci Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Silvia Lenci returned 3 record(s).

Number	Title
1	Leakage and trapping characteristics in Au-free AlGaN/GaN Schottky barrier diodes fabricated on C-doped buffer layers
2	Performance Optimization of Au-Free Lateral AlGaN/GaN Schottky Barrier Diode With Gated Edge Termination on 200-mm Silicon Substrate
3	AlGaN/GaN power schottky diodes with anode dimension up to 100 mm on 200 mm Si substrate