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Ananth Saran Yalamarthy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ananth Saran Yalamarthy returned 1 record(s).

NumberTitle
1DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air