Inductively coupled plasma sources from Plasma ALD, LLC.


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R. R. Tromp Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. R. Tromp returned 1 record(s).

NumberTitle
1Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics