Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

James Moore Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by James Moore returned 1 record(s).

NumberTitle
1Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells