M. Ambartsumov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Ambartsumov returned 2 record(s).

Number	Title
1	Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
2	Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures