Kuo-Hsiung Chu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kuo-Hsiung Chu returned 1 record(s).
| Number | Title |
|---|---|
| 1 | AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition |