Sang Woon Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang Woon Lee returned 3 record(s).

Number	Title
1	Atomic Layer Deposition and Electrical Properties of SrTiO₃ Thin Films Grown Using Sr(C₁₁H₁₉O₂)₂, Ti(Oi-C₃H₇)₄, and H₂O
2	Chemically conformal deposition of SrTiO₃ thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H₂O
3	Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N₂O Gas