Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Wolfgang Lehnert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wolfgang Lehnert returned 1 record(s).

NumberTitle
1Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide