Inductively coupled plasma sources from Plasma ALD, LLC.


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Shihyun Ahn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shihyun Ahn returned 2 record(s).

NumberTitle
1High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
2ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices