Taeyong Eom Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Taeyong Eom returned 2 record(s).

Number	Title
1	Influence of Substrates on the Nucleation and Growth Behaviors of Ge₂Sb₂Te₅ Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
2	Conformal Formation of (GeTe₂)_(1-x)(Sb₂Te₃)_x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories