Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Custom Batch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Batch hardware returned 2 records.

NumberTitle
1Challenges in spacer process development for leading-edge high-k metal gate technology
2Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition