Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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ASM Genitech MP-1000 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Genitech MP-1000 hardware returned 1 records.

NumberTitle
1Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films