Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

KEMICRO PEALD-200A Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using KEMICRO PEALD-200A hardware returned 1 records.

NumberTitle
1Layer-controlled and atomically thin WS2 films prepared by sulfurization of atomic-layer-deposited WO3 films