Oxford Instruments Atomfab Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Atomfab hardware returned 2 records.
| Number | Title |
|---|---|
| 1 | Plasma-Enhanced Atomic Layer Deposition of Al2O3 on Graphene Using Monolayer hBN as Interfacial Layer |
| 2 | Innovative remote plasma source for atomic layer deposition for GaN devices |