Inductively coupled plasma sources from Plasma ALD, LLC.


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InGaN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing InGaN films returned 3 record(s).

NumberTitle
1Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
2Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition