Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

PtO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing PtO2 films returned 2 record(s).

NumberTitle
1Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
2Remote Plasma ALD of Platinum and Platinum Oxide Films