Al_xGa_1-xN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Al_xGa_1-xN films returned 6 record(s).

Number	Title
1	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
2	Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition