TaNbO_x Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TaNbO_x films returned 1 record(s).

Number	Title
1	Role of the (Ta/Nb)O_x/Al₂O₃ interface on the flatband voltage shift for Al₂O₃/(Ta/Nb)O_x/Al₂O₃ multilayer charge trap capacitors

TaNbOx Plasma Enhanced Atomic Layer Deposition Film Publications