Film Structure Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Structure returned 3 record(s).

Number	Title
1	Degradation of the surface passivation of plasma-assisted ALD Al₂O₃ under damp-heat exposure
2	Plasma-Assisted Atomic Layer Deposition of Al₂O₃ at Room Temperature
3	Er coordination in Y₂O₃ thin films studied by extended x-ray absorption fine structure