Mobile Charge Density Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Mobile Charge Density returned 3 record(s).

Number	Title
1	Capacitance-voltage characteristics of gamma irradiated Al₂O₃, HfO₂, and SiO₂ thin films grown by plasma-enhanced atomic layer deposition
2	Fast PEALD ZnO Thin-Film Transistor Circuits
3	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources