Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Surface Free Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Free Energy returned 1 record(s).

NumberTitle
1Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers