Room temperature CO2 detection using interdigitated capacitors with heteropolysiloxane sensing films
Type:
Conference Proceedings
Info:
2016 IEEE SENSORS
Date:
2016-10-30
Author Information
| Name | Institution |
|---|---|
| Choongsoon Kim | Georgia Institute of Technology |
| Spyridon Pavlidis | Georgia Institute of Technology |
| Min-gu Kim | Georgia Institute of Technology |
| Oliver Brand | Georgia Institute of Technology |
| Hang Chen | Georgia Institute of Technology |
Films
Film/Plasma Properties
Substrates
Notes
| 966 |