Olivier Joubert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Olivier Joubert returned 2 record(s).

Number	Title
1	Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
2	Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH₃F/O₂/He plasmas