Inductively coupled plasma sources from Plasma ALD, LLC.


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Hyun Sang Sim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun Sang Sim returned 2 record(s).

NumberTitle
1Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
2A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect