Hyun Sang Sim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun Sang Sim returned 2 record(s).

Number	Title
1	A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
2	Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect