Kai Fu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kai Fu returned 2 record(s).

Number	Title
1	Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
2	Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT