Addressing optical, recombination and resistive losses in crystalline silicon solar cells | Thomas G. Allen | The Australian National University | 2017 |
Advanced precursor design for atomic layer depositionand chemical vapour deposition of gold metal | Matthew B. E. Griffiths | Carleton University | 2020 |
Advantages and challenges of plasma enhanced atomic layer deposition | Jan Musschoot | Ghent University | 2011 |
ALD Processes and Applications to Nanostructured Electrochemical Energy Storage Devices | Xinyi Chen | University of Maryland | 2013 |
Area selective atomic layer deposition of Si-based materials | Ekaterina A. Filatova | Tyndall National Institute, University College Cork | 2019 |
Area Selective Atomic Layer Deposition of Silicon Dioxide on Silicon Dioxide Using Surface Passivation of Copper Non-Growth Surface | Rohit Narayanan Kavassery Ramesh | Colorado School of Mines | 2022 |
Area-selective atomic layer deposition of Al2O3 | Athanasios Angelidis | Eindhoven University of Technology | 2019 |
Atomic layer deposited nickel oxide for perovskite solar cells | Algirdas Dučinskas | Eindhoven University of Technology | 2018 |
Atomic layer deposition and characterization of rare earth oxides for innovation in microelectronics | Luca Lamagna | Università degli Studi di Milano-Bicocca | 2009 |
Atomic Layer Deposition and Metal Organic Chemical Vapour Deposition of Materials for Photovoltaic Applications | Sarah Louise Hindley | University of Liverpool | 2014 |
Atomic Layer Deposition Enabled Integration of Multiferroic Composites | Jeffrey Chang | University of California - Los Angeles (UCLA) | 2018 |
Atomic Layer Deposition Enabled Synthesis of Multiferroic Nanostructures | Calvin D. Pham | University of California - Los Angeles (UCLA) | 2015 |
Atomic Layer Deposition for Lithium-Ion Batteries | Felix Mattelaer | Ghent University | 2017 |
Atomic layer deposition for preparation of TiSiO2 thin films | Július Vida | Masarykova Univerzita | 2017 |
Atomic Layer Deposition for Surface Engineering of Powders | Delphine Longrie | Ghent University | 2013 |
Atomic Layer Deposition of BiVO4 for Photocatalysis | Juha Ojala | University of Helsinki | 2022 |
Atomic layer deposition of copper – study through density functional theory | Gangotri Dey | Tyndall National Institute, University College Cork | 2014 |
Atomic layer deposition of III-nitrides and metal oxides : their application in area selective ALD | Ali Haider | Bilkent University | 2017 |
Atomic Layer Deposition of Metal Oxide Thin Films and Nanostructures | İnci Dönmez | Bilkent University | 2013 |
Atomic Layer Deposition of Multi-Insulator Metal-Insulator-Metal Capacitors | Dustin Zachary Austin | Oregon State University | 2017 |
Atomic Layer Deposition of Noble Metal Nanoparticles | Matthieu J. Weber | Eindhoven University of Technology | 2014 |
Atomic layer deposition of photovoltaics | Melissa M. McCarthy | Tyndall National Institute, University College Cork | 2019 |
Atomic Layer Deposition of Platinum: from surface reactions to nanopatterning | Adriaan J. M. Mackus | Eindhoven University of Technology | 2013 |
Atomic layer deposition of Ruthenium thin films using oxygen | R. O. F. Verkuijlen | Eindhoven University of Technology | 2009 |
Atomic Layer Deposition of Solid Electrolytes for Beyond Lithium-Ion Batteries | Alexander Campbell Kozen | University of Maryland | 2015 |
Atomic Layer Deposition of Strontium Titanate: from material control to nanoscale devices | Valentino Longo | Eindhoven University of Technology | 2014 |
Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu Metallizations | Petra Alén | University of Helsinki | 2005 |
Atomic Layer Deposition: from Reaction Mechanisms to 3D integrated Micro batteries | Harm C. M. Knoops | Eindhoven University of Technology | 2011 |
Chalcogen-Carbon Nanocomposite Cathodes For Rechargeable Lithium Batteries | Jung Tae Lee | Georgia Institute of Technology | 2014 |
Characterization of Plasma-Enhanced Atomic Layer Deposited Ga2O3 using Ga(acac)3 On GaN | Mei Hao | Arizona State University | 2018 |
Copper Diffusion Barrier Deposition on Integrated Circuit Devices by Atomic Layer Deposition Technique | Kai-Erik Elers | University of Helsinki | 2008 |
Deposition of Hydrogen-Doped Indium Oxide Thin Films Using Atmospheric-Pressure Plasma-Enhanced Spatial Atomic Layer Deposition | Anusha Varanasi | Delft University of Technology | 2017 |
Double-Gate, Tri-Layer, and Vertical ZnO TFTs and Circuits | Kaige Sun | The Pennsylvania State University | 2015 |
Electrical Properties and Device Applications of ALD ZnO and GaN Thin Films | S. Bolat | Bilkent University | 2014 |
Electrodynamics of strongly disordered superconductors | P. C. J. J. Coumou | Delft University of Technology | 2015 |
Electron Enhanced Atomic Layer Deposition (EE-ALD) for Room Temperature Growth of Gallium Nitride, Silicon, and Boron Nitride Films | Jaclyn K. Sprenger | University of Colorado, Boulder | 2018 |
Etude des dépôts par plasma ALD de diélectriques à forte permittivité diélectrique (dits ” High-K ”) pour les applications capacités MIM | D. Monnier | Institut National Polytechnique de Grenoble - INPG | 2010 |
Etude thermodynamique et élaboration de dépôts métalliques (W-N-C, Ti-N-C) par PEALD (Plasma Enhanced Atomic Layer Deposition) pour la réalisation d’électrodes de capacités Métal/Isolant/Métal dans les circuits intégrés | Rym Benaboud | Institut National Polytechnique de Grenoble - INPG | 2009 |
Fabrication, Characterization, and Simulation of Highly-Scaled III-V MOS Devices | Vallen Gary Rezazadeh | University of Alberta | 2017 |
Film damage by photons, ions and radicals during plasma-enhanched atomic layer deposition | M. Smits | A*STAR (Agency for Science, Technology and Research) | 2019 |
From sunlight to green hydrogen - metal oxides as extremely thin absorbers for photoelectrochemical water splitting | Matthias J. Müller | Technische Universität Berlin | 2021 |
High-κ Complex Oxides for Advanced Gate Dielectric Applications Grown by Atomic Layer Deposition | Kaveh Ahadi | University of Alberta | 2016 |
Hot-wire assisted atomic layer deposition of Tungsten films | Mengdi Yang | University of Twente | 2018 |
Hydrogen plasma-assisted spatial atomic layer deposition of SnOx | Andy van der Velde | Eindhoven University of Technology | 2019 |
Hydrogenated Indium Oxide (IO:H) by Plasma Enhanced Spatial Atomic layer deposition for thin film PV application | Saksham Pandey | Delft University of Technology | 2019 |
Improving Dielectric Thin Films for Metal Insulator Metal Diodes and Perovskite Solar Cells | Abdullah H. Alshehri | University of Waterloo | 2021 |
In situ infrared spectroscopy for plasma-assisted ALD of SiNx films | Lidewij E. Cornelissen | Eindhoven University of Technology | 2015 |
Influence of plasma parameters in pulsed microwave and radio frequency plasmas on the properties of gas barrier films on plastics | Felix Mitschker | Ruhr-University Bochum | 2018 |
Interface design for silicon-based anodes for lithium-ion batteries | Hongzheng Zhu | University of British Columbia | 2021 |
Low-Temperature Plasma Enhanced Atomic Layer Deposition of Silicon Nitride Thin Films for Encapsulation of Flexible OLEDs | Ji Min Kim | Seoul National University | 2018 |
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Silicon Dioxide and Aluminum Oxide | Zhen Zhu | Aalto University | 2019 |
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films | Mari Napari | University of Jyväskylä | 2017 |
Materials Passivation and Synthesis Using Atomic Layer Deposition-Based Techniques | Scott Toshio Ueda | University of California - San Diego | 2021 |
Mechanisms controlling silicon nitride growth by plasma-enhanced atomic layer deposition | Koen de Peuter | Eindhoven University of Technology | 2014 |
Microscopic Modeling, Machine Learning-Based Modeling and Optimal Operation of Thermal and Plasma Atomic Layer Deposition | Yangyao Ding | University of California - Los Angeles (UCLA) | 2021 |
Microwave Plasma Assisted ALD Development for the Deposition of Gate Oxides & ALD of High-k Dielectrics | Subin Thomas | Cochin University of Science and Technology | 2015 |
Modeling and In Situ Characterization of the Conformality of Atomic Layer Deposition in High Aspect Ratio Structures and Nanoporous Materials | Jolien Dendooven | Ghent University | 2012 |
Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control | Yichi (UCLA) Zhang | University of California - Los Angeles (UCLA) | 2021 |
Nanoengineering of Two-Dimensional WS2 by Atomic Layer Deposition | Shashank Balasubramanyam | Eindhoven University of Technology | 2020 |
Nanolayer surface passivation schemes for silicon solar cells | Gijs Dingemans | Eindhoven University of Technology | 2011 |
Nitride Based Metal Insulator Semiconductor Heterostructure Material and Device Design and Characterization | Jiechen Wu | University of California - Los Angeles (UCLA) | 2014 |
On the conformality of silicon oxide prepared by plasma atomic layer deposition - effect of process conditions on the recombination of oxygen radicals | J. H. Deijkers | Eindhoven University of Technology | 2020 |
On the Impact and Growth of Plasma-enhanced Atomic Layer Deposition High-k Dielectrics on 2D Crystals | Katherine M. Price | Duke University | 2019 |
PEALD and PECVD inorganic layers: Microstructure characterization and moisture permeation barrier properties | E.R.J. van Beekum | Eindhoven University of Technology | 2012 |
PECVD, Spatial ALD, and PEALD Zinc Oxide Thin Film Transistors | Jie Sun | The Pennsylvania State University | 2008 |
Photoinduced Charge Transfer at Metal Oxide/Oxide Interfaces Prepared with Plasma Enhanced Atomic Layer Deposition | Manpuneet Kaur | Arizona State University | 2016 |
Plasma assisted chemical deposition (CVD/ALD) and integration of Ti(Al)N and Ta(Al)N for sub-20 nm metal gate | Fabien Piallat | CEA - Grenoble | 2014 |
Plasma Enhanced Atomic Layer Deposition of Thin Film YSZ Electrolytes | Wenfei Zhang | University of Alberta | 2017 |
Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications | Yuanyuan Li | The Pennsylvania State University | 2013 |
Plasma-assisted atomic layer deposition of III-nitride thin films | Çağla Özgit | Bilkent University | 2014 |
Plasma-Assisted Atomic Layer Deposition of Metal Oxides and Nitrides | S. B. S. Heil | Eindhoven University of Technology | 2008 |
Plasma-assisted atomic layer deposition: an in situ diagnostic study | E. Langereis | Eindhoven University of Technology | 2008 |
Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymers | Maximilian Gebhard | Ruhr-University Bochum | 2017 |
Plasma-enhanced atomic layer deposition of transition metal phosphates | Thomas Dobbelaere | Ghent University | 2017 |
Plasma-Enhanced Atomic Layer Deposition Zinc Oxide Flexible Thin Film Electronics | Dalong Zhao | The Pennsylvania State University | 2010 |
Plasma-Enhanced Atomic Layer Deposition Zinc Oxide for Multifunctional Thin Film Electronics | Devin A. Mourey | The Pennsylvania State University | 2010 |
Plasma-Surface Interaction in Plasma-Assisted Atomic Layer Deposition | H. B. Profijt | Eindhoven University of Technology | 2012 |
Radical Enhanced Atomic Layer Deposition of Metals and Oxides | Antti Niskanen | University of Helsinki | 2006 |
Remote Plasma Deposition of Metal Oxides: Routes for Controlling the Film Growth | Ioana Volintiru | Eindhoven University of Technology | 2008 |
Schottky Nanodiodes Based on Zinc Oxide Thin Films | Mei Shen | University of Alberta | 2017 |
Selective Atomic Layer Deposition and Etching of Oxides | Alfredo Mameli | Eindhoven University of Technology | 2018 |
Semiconductor quantum structures for applications in the near infrared and blue regions | Päivi Mattila | Aalto University | 2016 |
Study of amorphous metals for nano-scale electronic devices | Jiaomin Ouyang | Stanford University | 2015 |
Study of Thermal and Plasma Enhanced Atomic Layer Deposition of AlN and Al2O3/TiO2 Films for Diverse Applications | Perttu Sippola | Aalto University | 2019 |
Surface Reactions During Atomic Layer Deposition of Cobalt Phosphate | Sander H.L. Raaijmakers | A*STAR (Agency for Science, Technology and Research) | 2019 |
Surface smoothing using atomic layer deposition and etching | S.H. Gerritsen | Eindhoven University of Technology | 2020 |
Tailoring Absorption in Optical Thin Films Using Atomic Layer Deposition of High Quality Titanium Nitride | Sasha Woodward-Gagné | Polytechnique Montréal | 2019 |
Templated Synthesis of Porous Materials via Atomic Layer Deposition | Shaoren Deng | Ghent University | 2015 |
The Use of Atomic Layer Deposition in Hybrid Hermetic Barriers for Medical Devices: ALD Nucleation and Plasma Activation Influence | Laura Astoreca Alvarez | Ghent University | 2022 |
Thermal and plasma-enhanced atomic layer deposition: the study of and employment in various nanotechnology applications | Alexander Pyymaki Perros | Aalto University | 2015 |
Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon | Ramazan Oguzhan Apaydin | University of Twente | 2020 |
Thermal Annealing of AlN Thin Films Fabricated by Plasma-Enhanced Atomic Layer Deposition for GaN Epitaxy | Lauri Riuttanen | Aalto University | 2010 |
Titanium nitride thin-film bias resistors for AC coupled segmented silicon detectors | Jennifer Ott | University of Helsinki | 2016 |
Understanding and Controlling Atomic Layer Deposition of Platinum and Platinum Oxide | Ivo Johannes Maria Erkens | Eindhoven University of Technology | 2014 |
X-ray reflectance and infrared spectroscopy study of plasma enhanced atomic layer deposited Al2O3 and SiO2 | Elena Ostrovskaia | Aalto University | 2017 |
ZnO Thin Film Electronics For More Than Displays | Jose Israel Ramirez | The Pennsylvania State University | 2015 |