Hongyun So Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hongyun So returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air