Your search for plasma enhanced atomic layer deposition publications authored by Fabien Piallat returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Evaluation of plasma parameters on PEALD deposited TaCN|
|2||Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V|
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