Moo-Sung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Moo-Sung Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
2Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
3Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition