Dae-Young Moon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Young Moon returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
2Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
4Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2018 plasma-ald.com