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Hengjiao Gao Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hengjiao Gao returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides |