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Shigeru Imai Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Imai returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer epitaxy of Si using atomic H |
| 2 | Atomic hydrogen-assisted ALE of germanium |
| 3 | Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon |