Thomas G. Allen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas G. Allen returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
2Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
3Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride


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